Structural Properties Of Si:H Thin Fılm Grown By VHF- PEDVD
Table 1:
| 100 MHz | 160 MHz | 200 MHz | |
| Root Mean Square Surface Roughness, Rrms (nm) | 3.46 | 2.21 | 2.44 |
| Average Surface Roughness Av (nm) | 2.67 | 1.76 | 1.96 |
| Mean Grain Size (nm) | 3.918x103 | 8.19x103 | 8.98x103 |
| Mean Grain Diameter (nm) | 7.063x101 | 1.02x102 | 1.069x102 |